Technical indicators

Spectral range 245-1000nm

Incident angle structure Manually change the incident angle, 40°-90°, step size is 5°, repeatability is 0.02°

Measurement repeatability For the standard sample of Si3N4(80nm)/Si: Film thickness repeatability: 0.05nm, refractive index repeatability: 0.001.

Single measurement time Full spectrum Ψ/Δ value measurement, typical measurement time5-10 seconds

Ellipsometric principle PSCA mode (P-polarizer; S-sample; C-compensator; A-analyzer)

Light source Broad spectrum light source

Polarizer/analyzer High-quality polarizing prism, high-precision computer control

Measure spot Manually adjust the spot diameter, 1-4 mm

Spectral resolution 1.6nm

Wavelength data interval Not larger than 0.5nm

Stage Compatible with solar cell samples of 230 mm╳230mmandbelow, the integrated sample stage can be easily convertedtomeasure single crystal or polycrystalline samples.

Sample alignment Auto-collimating telescopes & microscopes for precisionsamplealignment (height and tilt) electronic video-style image alignment

Detector Highly sensitive and low-noise spectral detector

Controller Contains circuit board, microcontroller unit, power supply, light source

Computer High quality computer including operating system

Output device The software interface supports output and input of spectral data

Authority management Including administrator rights and operator rights to facilitatethemanagement and use of the instrument

Operating mode One-touch conventional measurement mode for beginners touseAdvanced analysis mode: enables advanced analysis of complexmaterials

Spectral measurement Automatically sets optical component azimuth Manual/automatic execution of user-defined tasks Spectra are displayed in standard energy or wavelength unitsMonitoring of sample response, online representation of Ψ&Δ

Measurement result output Ellipsometric angles Ψ, Δ and other related output formsdielectric function refractive index, extinction coefficient Multi-angle spectral measurement, plotting and fitting Degree of polarization Select wavelength and angle data clips without altering theoriginal data Merge function to merge different data into one file

Modeling, simulation and fitting Able to fit multi-layer structures (single-layer membranes, composite membranes, periodic alternating multi-layer membranes), and obtain Ψ, Δ; Easy-to-use, user-expandable materials database; rich list of material optical constants; Material dispersion model: including Cauchy, Sellmeier, Lorentz, Drude and other material dispersion models; EMA effectivemedium approximation; each film layer can be regarded asauniform film, interface, rough surface. Synthetic data analysis: multiple incident angle measurements; multiple measurement methods (ellipsometry Ψ/Δ, transmission, reflection) Fitting: Fast regression fitting algorithms for optical modelsandmeasured data; Simultaneously graphically display measureddataand simulated data.

Results display Display graphics; advanced reporting functions, output measuredand calculated spectra, optical models and fitting parameters

File management function The software is based on the Windows platformand providescomprehensive file management functions