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PERFORMANCE ACCURACY AND PRICING
OPTOSENSE ELLIPSOMETER IS THE LEADER IN THE ELIPSOMETER MARKET
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OPT-CNF3000 Confocal Microscope
STANDARD FEATURES
- Microscope objective 10×, 20×, 50×, 100×
- Optical principles Principle of confocal 3D imaging
- Field of view size 1.2×1.2mm~0.12×0.12mm
- Comprehensive magnification 198-39966
- light source White LED
- Light receiving element Ultra-high definition color CMOS
- Z-Axis measurement repeatability <0.5%, measured with 50X objective lens at 4.7um standard height step block at ambient temperature 20 ±2 °C
- Z-axis AA-measurement accuracy ±1.5%
- Z-axis display resolution 1nm
- Maximum measurable height 100mm
- XY axis measurement repeatability <0.5%, measure 80um standard block with 50X objective lens at ambient temperature 20 ±2 °C
- XY axis measurement accuracy ±1.5%
- Stage Automatic travel 220 x 220mm
- Stage movement range 230 x 230mm
- Stage load 10kg
- Mapping measurement function
- Automatic measurement of multiple areas according to templates
- Light source life 60000h
- Measurement of pyramids on textured surface 1. Surface two-dimensional and three-dimensional structure 2. Height and width measurement of a single pyramid 3. Pyramid counting function: It can automatically count the number of grains per unit area, and mark the grain positions with cross symbols on the view. The number distribution diagram of pyramids of different specifications.
TECHNICAL SPECIFICATIONS
- Measurement of grid line
- 1. Grid line height and width measurement function: The number of section lines in a single field of view can be adjusted from 3 to 48, the height and width data are automatically calculated, and the aspect ratio is automatically calculated; at the same time, the user is provided with the function of inputting nominal values , can automatically determine OK/NG based on the nominal value;
- 2. Automatic division function of the grid line area: it can automatically circle the edge of the grid line, and automatically calculate the area, volume and other parameters of the grid line in the area;
- 3. Automatic grid line measurement function: It has the automatic search and measurement function of multiple grid lines, and completes automatic measurement according to different specifications;
- Pad point measurement
- 1. Measure the Pad points into regions and merge them to obtain the full 3D shape;
- 2. Measure the height difference of the curved and undulating surface to analyze the printing effect of Pad points;
- True color image Distinguish stains through scanned true color images
- Groove measurement Good measurements can be made for grooves with the same width at the top and bottom, and grooves with a width at the top and narrow grooves at the bottom.
OPTIONS
- Automatic analysis and measurement Batch measurements can be completed with one setting and exclusive positioning and focusing technology; no personnel are required to be present during the test process, and other operations can be performed during this period. You can also use a template file in which design values and tolerances are input to perform OK/NG judgment.
- Lens anti-collision protection Software ZSTOP sets limit anti-collision protection and electronic sensor anti-collision protection functions.
- Noise evaluation Nanoscale resolution environmental noise detection module
- Surface topography repeatability One-click analysis of surface topography repeatability Str parameters
- Dimensions 540*379*594mm
- Gross weight 450kg
- Working power supply AC220V/50Hz
- Working environment Temperature 10 ℃ ~35 ℃ , temperature gradient < 1 ℃ /15 minutes, humidity 30~80%, vibration <0.002g, less than 15Hz